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IntelliTrackTM
line of clean conveyor based transport
system
for wafer offers top level performance
in
smoothness,
cleanliness and intelligence at a
remarkably
affordable price. The
built-in intelligent
controller provides "plug-and-go" simplicity and often
eliminates the need of
outside contract integrator.
High
transport speeds up to 1 meter per second is
offered. IntelliTrack
system is offered for virtually all
types and sizes of carriers from
tiny 25mm disk to
PDP panel with more than 1 meter width.
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